Granted Patent
Utility
US 5,262,354 · App. 07/841,693
Refractory metal capped low resistivity metal conductor lines and vias
Inventors:
William J. Cote, Pei-Ing Lee, Thomas E. Sandwick, Bernd Vollmer, Victor Vynorius, Stuart H. Wolff
Patented Case
View Patent ↗
Granted: Nov 16, 1993
Filed: Feb 26, 1992
Inventors
William J. Cote
Pei-Ing Lee
Thomas E. Sandwick
Bernd Vollmer
Victor Vynorius
Stuart H. Wolff
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.