Granted Patent
Utility
US 5,278,420 · App. 07/975,826
Scanning control system involved in an ion-implantation apparatus
Inventor:
Toshiaki Sugiyama
Patented Case
View Patent ↗
Granted: Jan 11, 1994
Filed: Nov 13, 1992
Inventor
Toshiaki Sugiyama
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.