IP Library › Granted Patent US 5,285,142
Granted Patent Utility
US 5,285,142 · App. 08/015,520

Wafer stage with reference surface

Inventors: Daniel N. Galburt, Geoffrey O'Connor
Patented Case View Patent ↗
Granted: Feb 8, 1994 Filed: Feb 9, 1993
Inventors
Daniel N. Galburt
Geoffrey O'Connor
Assignee (at issue)
SVG Lithography Systems, Inc.

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Quick Facts
Patent No.
US 5,285,142
App. No.
08/015,520
Filed
1993-02-09
Granted
1994-02-08
Kind
A