Granted Patent
Utility
US 5,290,736 · App. 07/764,901
Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric
Inventors:
Nobuyoshi Sato, Kyoji Tokunaga, Tomoharu Katagiri, Tsuyoshi Hashimoto, Tomohiro Ohta
Patented Case
View Patent ↗
Granted: Mar 1, 1994
Filed: Sep 24, 1991
Inventors
Nobuyoshi Sato
Kyoji Tokunaga
Tomoharu Katagiri
Tsuyoshi Hashimoto
Tomohiro Ohta
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.