Granted Patent
Utility
US 5,292,400 · App. 07/854,718
Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching
Inventor:
Peter B. Mumola
Patented Case
View Patent ↗
Granted: Mar 8, 1994
Filed: Mar 23, 1992
Inventor
Peter B. Mumola
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.