Granted Patent
Utility
US 5,292,605 · App. 07/957,660
Method for control of photoresist develop processes
Inventor:
Mariste A. Thomson
Patented Case
View Patent ↗
Granted: Mar 8, 1994
Filed: Oct 7, 1992
Inventor
Mariste A. Thomson
Assignee (at issue)
Xinix, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.