IP Library › Granted Patent US 5,296,037
Granted Patent Utility
US 5,296,037 · App. 07/901,764

Plasma CVD system comprising plural upper electrodes

Inventors: Nobuyoshi Sato, Kojiro Sugane
Patented Case View Patent ↗
Granted: Mar 22, 1994 Filed: Jun 17, 1992
Inventors
Nobuyoshi Sato
Kojiro Sugane
Assignee (at issue)
Kawasaki Steel Corporation

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Quick Facts
Patent No.
US 5,296,037
App. No.
07/901,764
Filed
1992-06-17
Granted
1994-03-22
Kind
A