Granted Patent
Utility
US 5,298,457 · App. 08/082,952
Method of making semiconductor devices using epitaxial techniques to form Si/Si-Ge interfaces and inverting the material
Inventors:
William G. Einthoven, Joseph Chan, Dennis Garbis
Patented Case
View Patent ↗
Granted: Mar 29, 1994
Filed: Jul 1, 1993
Inventors
William G. Einthoven
Joseph Chan
Dennis Garbis
Assignee (at issue)
GI, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.