IP Library › Granted Patent US 5,300,321
Granted Patent Utility
US 5,300,321 · App. 08/056,768

Process for depositing titanium nitride film by CVD

Inventors: Tadashi Nakano, Tomohiro Ohta
Patented Case View Patent ↗
Granted: Apr 5, 1994 Filed: May 4, 1993
Inventors
Tadashi Nakano
Tomohiro Ohta
Assignee (at issue)
Kawasaki Steel Corporation

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Quick Facts
Patent No.
US 5,300,321
App. No.
08/056,768
Filed
1993-05-04
Granted
1994-04-05
Kind
A