Granted Patent
Utility
US 5,324,620 · App. 08/097,426
Radiation-sensitive compositions containing novolak polymers made from four phenolic derivatives and an aldehyde
Inventor:
Charles E. Ebersole
Patented Case
View Patent ↗
Granted: Jun 28, 1994
Filed: Jul 26, 1993
Inventor
Charles E. Ebersole
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.