Granted Patent
Utility
US 5,324,690 · App. 08/011,919
Semiconductor device having a ternary boron nitride film and a method for forming the same
Inventors:
Avgerinos V. Gelatos, Stephen S. Poon
Patented Case
View Patent ↗
Granted: Jun 28, 1994
Filed: Feb 1, 1993
Inventors
Avgerinos V. Gelatos
Stephen S. Poon
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.