Granted Patent
Utility
US 5,326,406 · App. 07/921,722
Method of cleaning semiconductor substrate and apparatus for carrying out the same
Inventors:
Yoshio Kaneko, Munetaka Koda, Tadayoshi Shiraishi, Takehiro Murakami
Patented Case
View Patent ↗
Granted: Jul 5, 1994
Filed: Jul 30, 1992
Inventors
Yoshio Kaneko
Munetaka Koda
Tadayoshi Shiraishi
Takehiro Murakami
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.