Granted Patent
Utility
US 5,330,881 · App. 07/994,602
Microlithographic method for producing thick, vertically-walled photoresist patterns
Inventors:
Alan L. Sidman, Susan Fung
Patented Case
View Patent ↗
Granted: Jul 19, 1994
Filed: Dec 21, 1992
Inventors
Alan L. Sidman
Susan Fung
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.