Granted Patent
Utility
US 5,343,076 · App. 08/155,539
Semiconductor device with an airtight space formed internally within a hollow package
Inventors:
Shigeru Katayama, Kaoru Tominaga, Junichi Yoshitake
Patented Case
View Patent ↗
Granted: Aug 30, 1994
Filed: Nov 22, 1993
Inventors
Shigeru Katayama
Kaoru Tominaga
Junichi Yoshitake
Assignee (at issue)
Mitsui Petrochemical Industries, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.