IP Library Granted Patent US 5,346,682
Granted Patent Utility
US 5,346,682 · App. 08/156,702

Process for the preparation of partially-substituted fluorosilane

Inventors: Makoto Aritsuka, Atsuhisa Mimoto, Isao Harada
Patented Case View Patent ↗
Granted: Sep 13, 1994 Filed: Nov 24, 1993
Inventors
Makoto Aritsuka
Atsuhisa Mimoto
Isao Harada
Assignee (at issue)
Mitsui Toatsu Chemicals, Incorporated

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Quick Facts
Patent No.
US 5,346,682
App. No.
08/156,702
Filed
1993-11-24
Granted
1994-09-13
Kind
A