Granted Patent
Utility
US 5,372,677 · App. 07/991,420
Method of manufacturing semiconductor devices
Inventors:
Satoshi Katayama, Kenichi Nitta, Katsuhiko Iimura
Patented Case
View Patent ↗
Granted: Dec 13, 1994
Filed: Dec 16, 1992
Inventors
Satoshi Katayama
Kenichi Nitta
Katsuhiko Iimura
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.