IP Library Granted Patent US 5,383,354
Granted Patent Utility
US 5,383,354 · App. 08/172,974

Process for measuring surface topography using atomic force microscopy

Inventors: Bruce B. Doris, Rama I. Hegde
Patented Case View Patent ↗
Granted: Jan 24, 1995 Filed: Dec 27, 1993
Inventors
Bruce B. Doris
Rama I. Hegde
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 5,383,354
App. No.
08/172,974
Filed
1993-12-27
Granted
1995-01-24
Kind
A