Granted Patent
Utility
US 5,391,285 · App. 08/202,210
Adjustable plating cell for uniform bump plating of semiconductor wafers
Inventors:
William H. Lytle, Tien-Yu Lee, Bennett L. Hileman
Patented Case
View Patent ↗
Granted: Feb 21, 1995
Filed: Feb 25, 1994
Inventors
William H. Lytle
Tien-Yu Lee
Bennett L. Hileman
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.