IP Library › Granted Patent US 5,399,456
Granted Patent Utility
US 5,399,456 · App. 07/978,099

Image reversal negative working photoresist containing O-quinone diazide and cross-linking compound

Inventors: Mark A. Spak, Donald Mammato, Dana L. Durham, Sangya Jain
Patented Case View Patent ↗
Granted: Mar 21, 1995 Filed: Nov 19, 1992
Inventors
Mark A. Spak
Donald Mammato
Dana L. Durham
Sangya Jain
Assignee (at issue)
Hoechst Celanese Corporation

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Quick Facts
Patent No.
US 5,399,456
App. No.
07/978,099
Filed
1992-11-19
Granted
1995-03-21
Kind
A