Granted Patent
Utility
US 5,407,782 · App. 07/940,195
Method of forming resist pattern in a multilayer resist
Inventor:
Shun Kobayashi
Patented Case
View Patent ↗
Granted: Apr 18, 1995
Filed: Sep 2, 1992
Inventor
Shun Kobayashi
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.