Granted Patent
Utility
US 5,413,954 · App. 07/973,900
Method of making a silicon-based device comprising surface plasma cleaning
Inventors:
Eray S. Aydil, Richard A. Gottscho, Zhen Zhou
Patented Case
View Patent ↗
Granted: May 9, 1995
Filed: Nov 10, 1992
Inventors
Eray S. Aydil
Richard A. Gottscho
Zhen Zhou
Assignee (at issue)
AT&T Bell Laboratories
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.