Granted Patent
Utility
US 5,417,799 · App. 08/124,057
Reactive ion etching of gratings and cross gratings structures
Inventors:
Thomas W. Daley, Charles L. Schaub, Hugh L. Garvin, Klaus Robinson
Patented Case
View Patent ↗
Granted: May 23, 1995
Filed: Sep 20, 1993
Inventors
Thomas W. Daley
Charles L. Schaub
Hugh L. Garvin
Klaus Robinson
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.