Granted Patent
Utility
US 5,419,805 · App. 08/198,708
Selective etching of refractory metal nitrides
Inventor:
Gurvinder Jolly
Patented Case
View Patent ↗
Granted: May 30, 1995
Filed: Feb 18, 1994
Inventor
Gurvinder Jolly
Assignee (at issue)
Nortel Networks Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.