Granted Patent
Utility
US 5,420,075 · App. 08/045,791
Forming multi-layered interconnections with fluorine compound treatment permitting selective deposition of insulator
Inventors:
Tetsuya Homma, Mieko Suzuki
Patented Case
View Patent ↗
Granted: May 30, 1995
Filed: Apr 14, 1993
Inventors
Tetsuya Homma
Mieko Suzuki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.