IP Library › Granted Patent US 5,426,061
Granted Patent Utility
US 5,426,061 · App. 08/301,559

Impurity gettering in semiconductors

Inventor: Bhushan L. Sopori
Patented Case View Patent ↗
Granted: Jun 20, 1995 Filed: Sep 6, 1994
Inventor
Bhushan L. Sopori
Assignee (at issue)
Midwest Research Institute, Inc.

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Quick Facts
Patent No.
US 5,426,061
App. No.
08/301,559
Filed
1994-09-06
Granted
1995-06-20
Kind
A