Granted Patent
Utility
US 5,430,292 · App. 08/134,860
Pattern inspection apparatus and electron beam apparatus
Inventors:
Ichiro Honjo, Kenji Sugishima, Masaki Yamabe
Patented Case
View Patent ↗
Granted: Jul 4, 1995
Filed: Oct 12, 1993
Inventors
Ichiro Honjo
Kenji Sugishima
Masaki Yamabe
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.