Granted Patent
Utility
US 5,432,381 · App. 08/122,302
Manufacturing method for a self-aligned through hole and semiconductor structure
Inventor:
Hanno Melzner
Patented Case
View Patent ↗
Granted: Jul 11, 1995
Filed: Sep 17, 1993
Inventor
Hanno Melzner
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.