Granted Patent
Utility
US 5,437,710 · App. 08/356,048
Chemical processing system for maintaining concentration of semiconductor processing solution
Inventors:
Robert W. Grant, Richard Novak
Patented Case
View Patent ↗
Granted: Aug 1, 1995
Filed: Dec 14, 1994
Inventors
Robert W. Grant
Richard Novak
Assignee (at issue)
Submicron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.