Granted Patent
Utility
US 5,439,523 · App. 08/195,766
Device for suppressing particle splash onto a semiconductor wafer
Inventor:
Akira Yamaguchi
Patented Case
View Patent ↗
Granted: Aug 8, 1995
Filed: Feb 14, 1994
Inventor
Akira Yamaguchi
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.