Granted Patent
Utility
US 5,439,842 · App. 08/236,299
Low temperature oxide layer over field implant mask
Inventors:
Mike F. Chang, David G. Grasso, Jun-Wei Chen
Patented Case
View Patent ↗
Granted: Aug 8, 1995
Filed: May 2, 1994
Inventors
Mike F. Chang
David G. Grasso
Jun-Wei Chen
Assignee (at issue)
SILICONIX INCORPORATED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.