Granted Patent
Utility
US 5,440,578 · App. 08/093,353
Gas replenishment method and apparatus for excimer lasers
Inventor:
Richard L. Sandstrom
Patented Case
View Patent ↗
Granted: Aug 8, 1995
Filed: Jul 16, 1993
Inventor
Richard L. Sandstrom
Assignee (at issue)
Cymer Laser Technologies
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.