Granted Patent
Utility
US 5,443,346 · App. 08/085,109
Wafer conveying system in a clean room
Inventors:
Masanao Murata, Teppei Yamashita, Tsuyoshi Tanaka, Takahide Hoshiko, Mitsuji Karita, Hitoshi Kawano, Tutomu Shinya
Patented Case
View Patent ↗
Granted: Aug 22, 1995
Filed: Jul 2, 1993
Inventors
Masanao Murata
Teppei Yamashita
Tsuyoshi Tanaka
Takahide Hoshiko
Mitsuji Karita
Hitoshi Kawano
Tutomu Shinya
Assignee (at issue)
Shinko Electric Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.