IP Library Granted Patent US 5,444,901
Granted Patent Utility
US 5,444,901 · App. 08/142,237

Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted

Inventors: Walter J. Wiegand, Frank W. Gobetz, Robert H. Bullis, James P. Towey, James W. Lennon
Patented Case View Patent ↗
Granted: Aug 29, 1995 Filed: Oct 25, 1993
Inventors
Walter J. Wiegand
Frank W. Gobetz
Robert H. Bullis
James P. Towey
James W. Lennon
Assignee (at issue)
UNITED TECHNOLOGIES CORPORATION

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Quick Facts
Patent No.
US 5,444,901
App. No.
08/142,237
Filed
1993-10-25
Granted
1995-08-29
Kind
A