IP Library › Granted Patent US 5,446,547
Granted Patent Utility
US 5,446,547 · App. 08/235,105

Combination of motorized and piezoelectric translation for long-range vertical scanning interferometry

Inventors: Bryan Guenther, Paul J. Caber, John B. Hayes
Patented Case View Patent ↗
Granted: Aug 29, 1995 Filed: Apr 29, 1994
Inventors
Bryan Guenther
Paul J. Caber
John B. Hayes
Assignee (at issue)
Wyko, Inc.

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Quick Facts
Patent No.
US 5,446,547
App. No.
08/235,105
Filed
1994-04-29
Granted
1995-08-29
Kind
A