Granted Patent
Utility
US 5,447,067 · App. 08/207,080
Acceleration sensor and method for manufacturing same
Inventors:
Markus Biebl, Thomas Scheiter, Helmut Klose
Patented Case
View Patent ↗
Granted: Sep 5, 1995
Filed: Mar 8, 1994
Inventors
Markus Biebl
Thomas Scheiter
Helmut Klose
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.