Granted Patent
Utility
US 5,447,570 · App. 07/902,995
Purge gas in wafer coating area selection
Inventors:
Johannes Schmitz, Frederick J. Scholz, Norman L. Turner, Raymond L. Chow, Frank O. Uher, Sien G. Kang, Steven C. Selbrede
Patented Case
View Patent ↗
Granted: Sep 5, 1995
Filed: Jun 23, 1992
Inventors
Johannes Schmitz
Frederick J. Scholz
Norman L. Turner
Raymond L. Chow
Frank O. Uher
Sien G. Kang
Steven C. Selbrede
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.