Granted Patent
Utility
US 5,449,316 · App. 08/178,531
Wafer carrier for film planarization
Inventor:
Alan Strasbaugh
Patented Case
View Patent ↗
Granted: Sep 12, 1995
Filed: Jan 5, 1994
Inventor
Alan Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.