IP Library › Granted Patent US 5,452,510
Granted Patent Utility
US 5,452,510 · App. 08/169,910

Method of making an electrostatic chuck with oxide insulator

Inventors: Michael Barnes, Robert P. Westerfield, Jr.
Patented Case View Patent ↗
Granted: Sep 26, 1995 Filed: Dec 20, 1993
Inventors
Michael Barnes
Robert P. Westerfield, Jr.
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 5,452,510
App. No.
08/169,910
Filed
1993-12-20
Granted
1995-09-26
Kind
A