Granted Patent
Utility
US 5,459,104 · App. 08/307,620
Process for production of semiconductor substrate
Inventor:
Shinsuke Sakai
Patented Case
View Patent ↗
Granted: Oct 17, 1995
Filed: Sep 19, 1994
Inventor
Shinsuke Sakai
Assignee (at issue)
Mitsubishi Materials Silicon Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.