Granted Patent
Utility
US 5,461,272 · App. 08/251,779
Planar micro-actuator
Inventor:
Hirofumi Matsumoto
Patented Case
View Patent ↗
Granted: Oct 24, 1995
Filed: May 31, 1994
Inventor
Hirofumi Matsumoto
Assignee (at issue)
NIPPON MEKTRON, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.