Granted Patent
Utility
US 5,464,520 · App. 08/094,283
Silicide targets for sputtering and method of manufacturing the same
Inventors:
Osamu Kano, Koichi Yasui, Yasuyuki Sato, Yasuhiro Yamakoshi, Junichi Anan, Hironori Wada, Akio Yasuoka
Patented Case
View Patent ↗
Granted: Nov 7, 1995
Filed: Jul 19, 1993
Inventors
Osamu Kano
Koichi Yasui
Yasuyuki Sato
Yasuhiro Yamakoshi
Junichi Anan
Hironori Wada
Akio Yasuoka
Assignee (at issue)
Japan Energy Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.