Granted Patent
Utility
US 5,467,249 · App. 08/169,903
Electrostatic chuck with reference electrode
Inventors:
Michael Barnes, John H. Keller, Joseph S. Logan, Robert E. Tompkins, Robert P. Westerfield, Jr.
Patented Case
View Patent ↗
Granted: Nov 14, 1995
Filed: Dec 20, 1993
Inventors
Michael Barnes
John H. Keller
Joseph S. Logan
Robert E. Tompkins
Robert P. Westerfield, Jr.
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.