Granted Patent
Utility
US 5,470,452 · App. 08/158,729
Shielding for arc suppression in rotating magnetron sputtering systems
Inventors:
Eric R. Dickey, Erik J. Bjornard
Patented Case
View Patent ↗
Granted: Nov 28, 1995
Filed: Nov 29, 1993
Inventors
Eric R. Dickey
Erik J. Bjornard
Assignee (at issue)
Viratec Thin Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.