Granted Patent
Utility
US 5,476,065 · App. 08/187,551
System for pulling-up monocrystal and method of exhausting silicon oxide
Inventors:
Kazuhiro Ikezawa, Hiroshi Yasuda, Akira Tanikawa, Hiroyuki Kojima, Koji Hosoda, Yoshifumi Kobayashi
Patented Case
View Patent ↗
Granted: Dec 19, 1995
Filed: Jan 28, 1994
Inventors
Kazuhiro Ikezawa
Hiroshi Yasuda
Akira Tanikawa
Hiroyuki Kojima
Koji Hosoda
Yoshifumi Kobayashi
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.