Granted Patent
Utility
US 5,477,057 · App. 08/292,096
Off axis alignment system for scanning photolithography
Inventors:
David Angeley, Stan Drazkiewicz, Gregg M. Gallatin
Patented Case
View Patent ↗
Granted: Dec 19, 1995
Filed: Aug 17, 1994
Inventors
David Angeley
Stan Drazkiewicz
Gregg M. Gallatin
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.