IP Library Granted Patent US 5,499,096
Granted Patent Utility
US 5,499,096 · App. 08/227,128

Optical instrument and measurement for measuring displacement of scale using different order diffraction of a diffraction grating

Inventor: Hideaki Tamiya
Patented Case View Patent ↗
Granted: Mar 12, 1996 Filed: Apr 13, 1994
Inventor
Hideaki Tamiya
Assignee (at issue)
Sony Magnescale Inc.

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Quick Facts
Patent No.
US 5,499,096
App. No.
08/227,128
Filed
1994-04-13
Granted
1996-03-12
Kind
A