Granted Patent
Utility
US 5,505,785 · App. 08/276,202
Method and apparatus for cleaning integrated circuit wafers
Inventor:
Gary W. Ferrell
Patented Case
View Patent ↗
Granted: Apr 9, 1996
Filed: Jul 18, 1994
Inventor
Gary W. Ferrell
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.