Granted Patent
Utility
US 5,510,615 · App. 08/478,479
Scanning probe microscope apparatus for use in a scanning electron microscope
Inventors:
Huddee Ho, Paul E. West
Patented Case
View Patent ↗
Granted: Apr 23, 1996
Filed: Jun 7, 1995
Inventors
Huddee Ho
Paul E. West
Assignee (at issue)
Topometrix Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.