IP Library Granted Patent US 5,513,531
Granted Patent Utility
US 5,513,531 · App. 08/114,162

Ultrasonic system for measurement of thin layers

Inventors: Mark A. Sapia, David S. Leonard
Patented Case View Patent ↗
Granted: May 7, 1996 Filed: Sep 1, 1993
Inventors
Mark A. Sapia
David S. Leonard
Assignee (at issue)
Combustion Engineering, Inc.

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Quick Facts
Patent No.
US 5,513,531
App. No.
08/114,162
Filed
1993-09-01
Granted
1996-05-07
Kind
A