IP Library Granted Patent US 5,513,668
Granted Patent Utility
US 5,513,668 · App. 08/194,325

Support for disk-shaped articles

Inventor: Franz Sumnitsch
Patented Case View Patent ↗
Granted: May 7, 1996 Filed: Feb 8, 1994
Inventor
Franz Sumnitsch
Assignee (at issue)
Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Gesellschaft m.b.H.

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Quick Facts
Patent No.
US 5,513,668
App. No.
08/194,325
Filed
1994-02-08
Granted
1996-05-07
Kind
A